PARC, a Xerox company based in Palo Alto, California USA, specializing in optoelectronic materials and devices, has reportedly ordered an Aixtron Close Coupled Showerhead (CCS) MOCVD system. The system will include the full set of advanced features such as the in-situ multichannel pyrometer ARGUS, high temperature growth, and gap adjustment for optimum (Al)GaN conditions in a wide pressure range.
Parc placed the order in the fourth quarter of 2010, the CCS system capable of operation in the 3×2-inch configuration. After delivery scheduled in the second quarter of 2011, Aixtron says that the system will be used for the epitaxial growth of InGaAlN LEDs, laser diodes, and electronic devices. A local Aixtron support team will commission the new reactor within a specially dedicated facility in PARC’s electronic materials and devices research division.