Epistar Receives its First Aixtron CRIUS II-XL MOCVD System

Aixtron SE based in Aachen, Germany, reports that its existing customer Epistar, a manufacturer of optoelectronic materials and devices in Taiwan, has received its first CRIUS II-XL system in a 19×4-inch wafer configuration. Epistar will use the system to mass produce ultra-high brightness (UHB) blue and white LEDs. According to Aixtron, the CRIUS II-XL configuration offers an outstanding reactor capacity as high as 19×4 inch, which represents a capacity increase of 46% compared to the original CRIUS II

The CRIUS II-XL system has successfully passed the process demonstration and acceptance test. In line with their usual procedure, Epistar will now further qualify the system in mass production. Epistar plans to purchase more CRIUS II-XL systems, when they expand their production capacity.  


Dr. Ming-Jiunn Jou, president of Epistar, commented, “Looking at this first tool, I can see that the CRIUS II-XL will make a huge difference to our productivity. Epistar has always had great confidence in Aixtron technology and, thanks to its seamless process compatibility with our earlier generation reactors, the latest CRIUS technology is set to rapidly and efficiently drive forward future capacity expansion and technology advances.”

Dr. Bernd Schulte, COO of Aixtron, adds, “With the purchase of our latest system, the CRIUS II-XL, Epistar continues to pursue its cutting-edge production and engineering innovation in epitaxial growth. The CRIUS II-XL design concept offers the largest productivity with best-in-class uniformities, which massively increases yield and directly translates into enhanced competitiveness for Epistar’s products in an ever demanding marketplace.”

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